Mass flow regulator MFC series

for gascost-effectivecompact

Overview
The MFC series are gas mass flow controllers for non-corrosive gases, covering a range of flow rates and industrial applications. Standard interfaces include analog and RS485 Modbus; additional bus options (DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link) are available depending on the series.

MFC2000

• General-purpose gas mass flow controllers
• Full-scale flow range: 50 mLn/min to 200 Ln/min
• Interfaces: analog and RS485 Modbus; optional industrial bus interfaces

MFC4000

• Designed for non-corrosive gas flow control
• Full-scale flow range: 50 mLn/min to 1000 mLn/min
• Compact / tiny form factor for instrumentation and portable devices
• Interfaces: analog and RS485 Modbus; optional bus interfaces

MFC5100M

• Full-scale flow up to 100 Ln/min
• Integrated touchscreen for basic operation and configuration
• RS485 Modbus available; other bus options listed as alternatives

MFC5000

• SEMI-compliant series for process control applications
• Wide bus communication support: DeviceNet, ProfiNet, EtherCat, IO-Link, etc.
• 100:1 dynamic range; pressure control 0.1–1 MPa (15–150 PSI)
• Compensated temperature range: 0–50°C; capable of vacuum operation

MFC1100

• High-volume gas flow control: full-scale 20–50 Ln/min
• Control outputs: analog (0–5 Vdc or 4–20 mA) and RS485 Modbus for proportional-valve control
• 100:1 dynamic range; pressure 0.1–0.8 MPa (15–117 PSI); compensated temperature 0–55°C
• Typical uses: digital delivery of anesthesia, welding gases

MFC1600

• Cost-effective aluminium-alloy package
• Intended for low-flow non-corrosive gas control (very low flow capabilities)
• Interfaces: analog and RS485 Modbus
• Pressure range: 0.1–0.8 MPa (15–120 PSI); compensated temperature 0–50°C
• Typical uses: thin-film deposition, medical equipment

Specifications / technical characteristics

• Product family: MFC (Mass Flow Controllers) for non-corrosive gases
• Common interfaces: Analog, RS485 Modbus; optional DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link
• Flow ranges: from mLn/min levels up to 1000 mLn/min depending on model
• Dynamic range: up to 100:1 (model-dependent)
• Pressure ranges: examples include 0.1–0.8 MPa and 0.1–1 MPa (model-dependent)
• Temperature compensation ranges: examples 0–50°C and 0–55°C (model-dependent)
• Form factors: compact/tiny options for instrumentation; aluminium alloy economical packages
• Typical applications: process control, instrumentation/portable devices, thin-film deposition, medical equipment, digital gas delivery, welding gases