Mass flow controller MFC5000

for gasDeviceNetProfiNet

The MFC5000 series gas mass flow controllers are made in compliance with SEMI standards for the relevant applications. The product offers a wide range of bus communication options, including DeviceNet, ProfiNet, EtherCat, and IO-Link. These interfaces can also be further customized upon request. The MFC5000 is designed for process control, featuring a 100:1 dynamic range. It controls pressure in the range of 0.1 to 1 MPa （15 to 150 PSI） and a compensated temperature range of 0 to 50°C. The device can also work under vacuum conditions.