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Flow rate: 0.003 m³/h - 12 m³/h
Pressure: 100,000 Pa - 1,000,000 Pa
... li>Gas mass flow controller with user touchscreen for basic functions
MFC5000
- Process-grade
SIARGO
Flow rate: 0.005 l/min - 500 l/min
Pressure: 0.2 bar - 8 bar
Nominal diameter: 1 mm - 20 mm
... EtherCAT, IO-Link) are available by series.
MFC2000
- General-purpose gas mass flow controllers
- Full-scale flow range: 50 mLn/min to 200 Ln/min
- Interfaces:
SIARGO
... MFC4000 series are designed for applications where high purity flow process is mandate. The sensing chip is conformingly coated with SEMI-grade anti-corrosion films. Other package materials are also strictly selected to the highest industry ...
SIARGO
Flow rate: 0 l/min - 200 l/min
Pressure: 0.1 MPa - 0.8 MPa
... designed for general purpose mass flow control application with clean and dry gases. It utilizes the company's Thermal-D sensing chip and can be applied for non-corrosive gases with known diffusivities. MFC2000 series ...
SIARGO
Flow rate: 1 l/min - 70 l/min
Pressure: 0 MPa - 1 MPa
... auto-detections are among the possibilities. The meters are operated with Siargo’s proprietary MEMS Thermal-D mass flow sensing technology and smart control electronics. The sensor surface is passivated ...
SIARGO
The company also offers original development manufacture for trusted customers. The products can be tailored with a variety of data interfaces, multiparameter sensing and gas mixture concentration monitoring and other customized features. Click on the ...
SIARGO