Mass flow regulator

proportionalfor gaswith LCD display

Overview
This page lists Siargo mass flow controllers for non-corrosive gas applications across multiple series and form factors. The portfolio addresses instrumentation, process and portable-device needs with configurable communication and mechanical/electrical options.

MFC2000

• General-purpose gas mass flow controller for non-corrosive gases
• Full-scale flow ranges: from 50 mLn/min up to 200 Ln/min (model-dependent)
• Interfaces: analog and RS485 Modbus; other communication options available on request

MFC2100

• General-purpose gas mass flow controller for non-corrosive gases
• Full-scale flow ranges: up to 50 mLn/min
• Enhanced ingress protection: Class 65
• Electronics compatible with MFC2000; electrical and mechanical interfaces customizable

MFC2600

• General-purpose gas mass flow controller for non-corrosive gases
• Full-scale flow ranges: up to 50 mLn/min
• Standard manifold (manifold-ready) mechanical design to simplify multi-controller installation
• Electrical interface fully customizable

Documents and resources

• Datasheets are available for multiple series — consult product datasheets for detailed specifications and ordering codes

Technical specifications

• Application: mass flow control of non-corrosive gases
• Flow ranges: from millilitre-per-minute scales (mLn/min) up to litre-per-minute scales (Ln/min) depending on series
• Communication interfaces: analog, RS485 Modbus; additional bus options across series: DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link
• Ingress protection example: Class 65 for MFC2100
• Mechanical options: manifold-ready designs for multi-controller installation (MFC2600), compact/tiny form-factor for portable instrumentation (MFC4000)
• Compliance: SEMI standards for MFC5000 (process applications)
• Dynamic range: up to 100:1 for selected series (MFC5000, MFC1100)
• Pressure ranges referenced: typical examples 0.1–0.8 MPa and 0.1–1 MPa depending on model
• Compensated temperature ranges: typically 0 to 50 °C (some series up to 55 °C)
• User interfaces: touchscreen (MFC5100M), rotary switches and reset switch (MFC1700)