Nanopositioning stage with built-in encoder METIRIO

The read-head constitutes the core of the METIRIO® encoder. All optical and electrical components have been embedded inside a very small footprint flip-chip package. Specifications Compact Size [mm] - 6.6 x 5.1 x 1.7 Low Current Consumption [mA] - 20 Position Resolution [nm] - 0,4 @ 20 mm/s High Speed [m/s] - 10 Central Wavelength [nm] - 850 (Invisible) Electrical Data Supply Voltage VDD [V] - 3 to 5.5 Output Position Signal (sine) [Vpp] - 1 Output Reference Signal (square) [VDD] - RS485 Bandwidth (f3dB) [kHz] - 500 ESD Susceptibility (HBM) [kV] - 4 at each pin Startup Time [µs] - 150 Digital Interface - TWI Environment UHV compatibility [mbar] - HV (1E-6); UHV (1E-11) Maximum bake-out temperature [°C] - 160 Operating temperature range [°C] - 0 - 80 Humidity (40 °C) [ - 80 non-condensing Scale Compatibility Grating Type - reflective Scale Pitch [µm] - 20 Scale Type - linear, convex, rotary (down to 12 mm diameter) Allowed Working Distances [mm] - 1.2 mm (standard), more options upon request