The integrated light source illuminates a scale comprising an incremental grating with 20 µm pitch and a track with reference marks for absolute positioning. The reflected light generates an interference pattern which is detected by the diode array within the readhead. A relative movement between the scale and the readhead leads to analog sine and cosine signals as well as a TTL-shaped reference mark.
> Compact Size 6.6 x 5.1 x 1.7 mm
> High Resolution: 0.4 nm @ 1 m/s
> Positioning Speed: up to 10 m/s
> UHV compatibility down to 10-11 mbar
> Operating Temperature Range: 0 °C – 80 °C
> Rough environments with mechanical vibrations
> Compatible with a broad variety of reflecting scales with 20 µm pitch
> Closed Loop Motion Systems
> Robotics
> Semiconductor Industry
> Gauge for Displacement Measurement Systems
> High Precision Sample Scanning in Life Science and Microscopy
> High Resolution 3D-Printing
> Research & Development