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Recirculation chiller for the semiconductor industry HRZ series
high-performancewater-cooled

Recirculation chiller for the semiconductor industry - HRZ series - SMC Corporation of America - high-performance / water-cooled
Recirculation chiller for the semiconductor industry - HRZ series - SMC Corporation of America - high-performance / water-cooled
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Characteristics

Applications
for the semiconductor industry
Other characteristics
high-performance, water-cooled
Power

Min.: 0 kW

Max.: 10 kW

Maximum temperature

Min.: -20 °C
(-4 °F)

Max.: 90 °C
(194 °F)

Flow rate

20 l/min, 30 l/min
(5.283 us gal/min, 7.925 us gal/min)

Pressure

Min.: 0 MPa

Max.: 1.5 MPa

Description

HRZF010 is a water-cooled recirculating chiller for high technology sectors which employs R454C as a refrigerant. R454C has a GWP of 148, complying with current and future US and EU regulations of fluorinated greenhouse gases by lowering its environmental impact. DC inverters on the compressor and pump save operating energy. Front panel includes ventilation intake, emergency shutoff switch, LCD operation panel, and 30A breaker with handle. Rear panel includes water and circulating fluid connections, drain and fluid fill ports, power connections and a ventilation exhaust fan. Casters with brakes allow easy relocation as necessary. Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol Temperature stability: ±0.1°C Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz) Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47

Catalogs

HRZ series
HRZ series
52 Pages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.