Linear positioning stage MT130

electric1-axiscrossed roller

MT130 Compact linear stage with internal motor The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact positioning system. • Travels up to 80 mm in small installation spaces (130 x 130 x 43 mm) • Repeatability up to 2.3 µm • Easily stackable to compact multi-axis systems Options: • Available with DC motor or stepper motor • 3-axis compact unit: MP130-3 • Combinable with DT130 rotary stage • Stainless steel option for increased rigidity • Version for clean room, vacuum and EUV Fields of application Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment Technical Data: • Travel: 50 mm, 80 mm • Repeatability unidirectional: ± 2.3 µm • Repeatability bidirectional: ± 4.3 µm • Accuracy: ± 8.1 µm, ± 9.7 µm • Positioning speed: 20 mm/s • Max. acceleration: 0.4 m/s2 • Max. Load Fx: 45 N • Max. Load Fy: 95 N • Max. Load Fz: 95 N