Linear guide unit with recirculating ball carriage SR-MS series

15 mm20 mmlubrication-free

Overview
This oil-free LM Guide SR-MS is designed for special environments. It operates from atmospheric pressure to high vacuum (suitable down to ~10⁻6 Pa), withstands baking up to 200°C and is supplied in sizes 15 and 20 with stainless steel components.

Key tags

• Oil-free
• Dry Lubrication S-Compound Film
• Vacuum compatible (≈10⁻6 Pa)
• High-temperature baking up to 200°C
• Stainless steel construction

Structure and features

• Stainless steel construction: components are made of stainless steel and materials suitable for special environments.
• Degreased and cleaned: delivered degreased with a special solvent to reduce contamination.
• Grease-free lubrication: uses a reliable dry lubricant (S-Compound Film) applied to stainless steel balls for grease-free operation.

Main advantages
Suitable where very low outgassing and low chemical (gaseous) contamination are required. Usable continuously up to 150°C with short-term tolerance to 200°C. Operable in vacuum levels down to ~10⁻6 Pa.

What is Dry Lubrication S-Compound Film?
Dry Lubrication S-Compound Film is a fully dry lubricant developed for use from atmospheric to high-vacuum environments. It offers high load capacity, good wear resistance and strong sealability compared with many alternatives.

Comparison: lubrication materials

• Molybdenum disulfide (hexagonal): Friction coefficient (no vacuum) 0.05–0.25; wear resistance adequate; vacuum friction 0.02–0.1; suitable for vacuum.
• Silver (soft metal): Not applicable in no-vacuum tests; vacuum friction 0.1–0.3; suitable for vacuum.
• DLC (diamond-like carbon): Friction coefficient (no vacuum) 0.06–0.15 with superior wear resistance; in vacuum friction 0.3–0.5; generally for non-vacuum use.
• Dry Lubrication S-Compound Film: Friction coefficient (no vacuum) 0.02–0.05; wear resistance good; vacuum friction 0.01–0.03; usable in both no-vacuum and vacuum environments.

Outgassing in vacuum
No measurable outgassing was observed from the S-Compound Film in high-vacuum conditions.

Durability
The oil-free LM Guide shows stable fatigue life. The service life of the S film depends on wear and varies with environment and operating conditions; evaluate under actual conditions.

Typical applications

• Semiconductor / FPD manufacturing: exposure equipment, organic EL manufacturing, ion implantation, lithography — low organic outgassing; high-temperature operability (up to 150°C).
• Analyzers and inspection equipment: mass spectrometers, X-ray inspection systems — operable in high vacuum; stable rolling resistance at low speeds.
• Space industry: satellite components, robotic arms — low volatility and material loss in space; stable rolling resistance at low temperatures.

Dimensional summary
Available sizes: 15, 20. LM rail standard lengths (L0): SR15MS — 160, 220, 280, 340, 400 mm; SR20MS — 220, 280, 340, 400 mm. Standard pitch F: 60 mm. G, g dimensions: 20 mm for both sizes. Maximum standard LM rail length: 400 mm.

Notes

• Model SR-MS does not include contamination protection accessories.
• Permissible load values refer to radial-direction limits and relate to the strength of the dry lubricant film. Service life of the S film depends on environment and operating conditions and should be validated in actual use.

Specifications

• Model / series: SR-MS
• Sizes available: 15, 20
• Material: stainless steel components for special environments
• Lubrication: Dry Lubrication S-Compound Film (fully dry; for atmospheric to high vacuum)
• Vacuum usability: operable from atmospheric pressure to high vacuum (~10⁻6 Pa)
• Operating temperature: continuous up to 150°C; short-term tolerance up to 200°C; baking up to 200°C
• Outgassing: no outgassing observed from S-Compound Film in high vacuum
• Grease: not used (grease-free)
• Durability: stable fatigue life; service life of S film is wear-based and environment-dependent
• Typical applications: semiconductor/FPD manufacturing, analyzers/inspection, space industry
• LM rail standard lengths: SR15MS L0 = 160 / 220 / 280 / 340 / 400 mm; SR20MS L0 = 220 / 280 / 340 / 400 mm
• Standard pitch: 60 mm
• G, g dimensions: 20 mm