linear position sensor / non-contact / optical / infrared
ZPS™ Absolute Position Measurement System
Contact / non-contact:
optical, infrared, fiber optic
compact, high-precision, absolute, miniature, high-resolution, precision, high-sensitivity, sub-nanometer resolution, with external electronics, intrinsically safe
industrial, for small spaces
Max.: 4.1 mm
Min.: 2.9 mm
Max.: 208,000 Hz
Min.: 1 Hz
ZPS: Absolute Position Measurement System
The ZPS™ system provides high-precision non-contact absolute position measurement
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables.
The ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.
All electronics for the absolute position measurement system are housed in this rack-mountable enclosure.
• Non-contact optical measurement
• Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
• High-precision system using proprietary compensation algorithms
• Ultra-compact sensors with no EMI sensitivity or heat generation
• Reliable telecom-proven fiber optic components
• Scalable, up to 64 channels