linear position sensor / non-contact / optical / infrared
ZPS™ Absolute Position Measurement System

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Characteristics

  • Type:

    linear

  • Contact / non-contact:

    non-contact

  • Technology:

    optical, infrared, fiber optic

  • Output signal:

    digital, Ethernet

  • Other characteristics:

    compact, high-precision, absolute, miniature, high-resolution, precision, high-sensitivity, sub-nanometer resolution, with external electronics, intrinsically safe

  • Applications:

    industrial, for small spaces

  • Measuring range:

    Max.: 4.1 mm

    Min.: 2.9 mm

    3.5 mm

  • Measuring rate:

    Max.: 208,000 Hz

    Min.: 1 Hz

Description

ZPS: Absolute Position Measurement System
The ZPS™ system provides high-precision non-contact absolute position measurement

ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.

The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.

The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables.

Applications

The ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.

All electronics for the absolute position measurement system are housed in this rack-mountable enclosure.

Key Features:
• Non-contact optical measurement
• Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
• High-precision system using proprietary compensation algorithms
• Ultra-compact sensors with no EMI sensitivity or heat generation
• Reliable telecom-proven fiber optic components
• Scalable, up to 64 channels