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Volumetric flow rate: 0 l/min - 0.1 l/min
Process temperature: 0 °C - 80 °C
Process pressure: 1.1 bar - 3.5 bar
... Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 0.13 bar - 4 bar
Repeatibility: 0.01 % - 0.3 %
... CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and low flow ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 3.5 bar - 7.5 bar
Repeatibility: 0.03 % - 0.3 %
... less for improved throughput High Accuracy Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment Fast Response Response: < 0.8 second Accurate, stable flow control ...
HORIBA STEC
Process temperature: 15 °C - 45 °C
Process pressure: 2.4 bar - 4.12 bar
... D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ≤ 5SCCM flow control has been very critical in high aspect ratio process. Specialized components and newly developed in-house ...
HORIBA STEC
Process temperature: 15 °C - 60 °C
Process pressure: 2.4 bar - 3.5 bar
... D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITERION pressure-based flow measure and control technology to provide ...
HORIBA STEC
Volumetric flow rate: 0.1, 0.3 l/min
Process pressure: 0.5 bar - 4 bar
Repeatibility: 0.15, 0.01 %
... to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and ...
HORIBA STEC
... the latest model in its series of ultra-thin mass flow controllers on January 14th. This product increases full-scale flow*1 by approximately seven times that of previous models and achieves a maximum mass ...
HORIBA STEC
Volumetric flow rate: 0 us gal/min - 100 us gal/min
Process temperature: 5 °C - 50 °C
Process pressure: 0.5 bar - 3 bar
... micro-litre to ultra low flow rate control Enable precision flow control of low boiling point and high viscosity liquids Ultra clean. Measurement Techniques Cooling Measurement Method The flow ...
HORIBA STEC
Volumetric flow rate: 0 m³/h - 33,629 m³/h
Process temperature: -200 °C - 350 °C
... U-shaped dual sensors maximize accuracy Flow rate turndown up to 200:1 Suitable for liquids and gases Sensor sizes from <1mm through 10” Ability to measure rates from 0-0.032 GPH to 0-423,000 BPD Flow ...
Process temperature: -200 °C - 200 °C
Process pressure: 0 bar - 94 bar
... ALTImass from Oval is high-performance flow meter which is able to directly measures the mass flow with extremely accurate and supplied with high-powered transmitter. This device is also ...
Oval Corporation
Process temperature: -200 °C - 200 °C
Process pressure: 0 bar - 94 bar
... ULTRAmassMK II Series, manufactured by Oval Corporation, is a coriolis flow meter designed to provide an accurate flow rate measurement. It has a 3/8" nominal size, 4 kg/min flow range, ...
Oval Corporation
Volumetric flow rate: 10 l/min - 8,000 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 7 bar
... is capable of displaying and computing the flowrate, that is converted to normal flowrate of 0°C. Additionally, the flow monitor features a nominal size range of 15 mm, 20 mm, 25 mm, 40 mm and 50 mm. The device functions ...
Oval Corporation
Volumetric flow rate: 2.4 m³/h - 450 m³/h
Process temperature: 0 °C - 60 °C
Process pressure: 0 bar - 9.8 bar
... Features of the device include a wide flow range, high precision, ability to display and output the flow rate converted to normal flow rate (0°C, 1 atm). It has no moving parts, making it a highly durable ...
Oval Corporation
Volumetric flow rate: 0 m³/h - 3,640 m³/h
Process temperature: -40 °C - 500 °C
Process pressure: 0 bar - 10 bar
... The MFT-B series from OVAL is a mass flowmeter for gas service that is especially designed to be highly portable and can be used for in-line applications. This thermal mass flowmeter ...
Oval Corporation