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Volumetric flow rate: 0 l/min - 0.1 l/min
Process temperature: 0 °C - 80 °C
Process pressure: 1.1 bar - 3.5 bar
... Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 0.13 bar - 4 bar
Repeatibility: 0.01 % - 0.3 %
... CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 3.5 bar - 7.5 bar
Repeatibility: 0.03 % - 0.3 %
... provides a simplified gas supply system Multi-range, multi- gas, multi-pressure solution The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure ...
HORIBA STEC
Process temperature: 15 °C - 45 °C
Process pressure: 2.4 bar - 4.12 bar
... D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ≤ 5SCCM flow control has been very critical in high aspect ratio process. Specialized components and newly developed in-house ...
HORIBA STEC
Process temperature: 15 °C - 60 °C
Process pressure: 2.4 bar - 3.5 bar
... accurate performance. In addition, uniqueness of D700T is utilizing a patented advanced flow control algorithm with twin valve structure which enables customer's gas delivery system to solve multiple ...
HORIBA STEC
Volumetric flow rate: 0.1, 0.3 l/min
Process pressure: 0.5 bar - 4 bar
Repeatibility: 0.15, 0.01 %
... pressure readings are provided. Basic Features Multi Gas / Multi Range function. The gas type and full scale flow rate can be changed by the customer Stable control of the gas ...
HORIBA STEC
... latest model in its series of ultra-thin mass flow controllers on January 14th. This product increases full-scale flow*1 by approximately seven times that of previous models and achieves a maximum mass flow ...
HORIBA STEC