HORIBA thermal flow meters
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Volumetric flow rate: 0 l/min - 0.1 l/min
Process temperature: 0 °C - 80 °C
Process pressure: 1.1 bar - 3.5 bar
... state monitor function Flow/Pressure zero adjustment counts Valve drive counts Record of max/min P0,P1,P2 pressure Record of max/min Block temperature Total time over/below pressure spec. Total time over/below ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 0.13 bar - 4 bar
Repeatibility: 0.01 % - 0.3 %
... State monitor function Flow/Pressure zero adjustment counts Valve drive counts Record of max/min P0,P1,P2 pressure Record of max/min Block temperature Total time over/below pressure spec. Total time over/below ...
HORIBA STEC
Process temperature: 0 °C - 80 °C
Process pressure: 3.5 bar - 7.5 bar
Repeatibility: 0.03 % - 0.3 %
... less for improved throughput High Accuracy Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment Fast Response Response: < 0.8 second Accurate, stable flow control ...
HORIBA STEC
Process temperature: 15 °C - 45 °C
Process pressure: 2.4 bar - 4.12 bar
... D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ≤ 5SCCM flow control has been very critical in high aspect ratio process. Specialized components and newly developed in-house ...
HORIBA STEC
Volumetric flow rate: 0.1, 0.3 l/min
Process pressure: 0.5 bar - 4 bar
Repeatibility: 0.15, 0.01 %
... mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. ...
HORIBA STEC
... latest model in its series of ultra-thin mass flow controllers on January 14th. This product increases full-scale flow*1 by approximately seven times that of previous models and achieves a maximum mass flow ...
HORIBA STEC
Volumetric flow rate: 0 us gal/min - 100 us gal/min
Process temperature: 5 °C - 50 °C
Process pressure: 0.5 bar - 3 bar
... micro-litre to ultra low flow rate control Enable precision flow control of low boiling point and high viscosity liquids Ultra clean. Measurement Techniques Cooling Measurement Method The flow ...
HORIBA STEC
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