STEINMEYER servo-driven positioning systems

Repeatability: 1 µm
Load: 15 kg
Stroke: 200 mm - 1,000 mm

... Speed: 500 - 1000 mm (XY) / 50 - 100 (Z) - Max. Load: 150 N (Z) - Drive: Linear Motor, Profile Rail (XY) / Ball Screw, AC Servo (Z) - Feedback: linear scale - Motion Controller: FMC series, ACS, PLC integration Customized ...

Repeatability: 0.3 µm - 2.5 µm
Load: 5 kg - 20 kg
Stroke: 100 mm - 720 mm

... simultaneously This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. One high-resolution ...

Repeatability: 0.2 µm - 2.5 µm
Load: 25 kg
Stroke: 200 mm - 700 mm

... different base plates - Wipeable, chemical resistant surfaces - Control in Z manual or motorized - Clean room versions ISO 14644-1 (up to class 1 on request) - Ready-to-use control ...

Repeatability: 0.7 µm - 1 µm
Load: max 15.0 kg
Stroke: 200 mm - 1,300 mm

... Standard System: LA250 - (XY) / PLT165 (Z) - Stroke: 800 x 1300 x 200 mm - Repeatability: 0.7 – ±1 µm - Speed: 500 - 1000 mm (XY) / 50 - 100 mm (Z) - Max. load: 150 N (Z) - Drive: linear motor (iron core), Profile ...

Repeatability: 0.3 µm - 2.5 µm
Speed: 150 mm/s - 750 mm/s

... simultaneously • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure This inspection system consists of four cleanroom axes and enables ...

Repeatability: 0.001 µm - 4.4 µm
Stroke: 1.5 mm - 100 mm
Speed: 0.4 mm/s - 1,400 mm/s

... tilt and lateral offset up to 0.5 µm • Aperture of 45 mm for the beam line • Air-bearing rotary stage for accuracies up to 0.0005° This positioning system allows tangential scanning ...

Repeatability: 0.4 µm - 0.8 µm
Stroke: 100 mm - 300 mm
Speed: 80 mm/s - 630 mm/s

... Linear Motor (XYZ) / AC-Servo, Ball Screw (Z, Z1-5) - Feedback: Linear Scale Customized options: - Modular system configuration - Expandable with up to five powerful secondary Z-axes for integrating ...