8-axis positioning system 417815.2022.W3.AB

multi-axisportalservo-driven

Customizable: • Ideal for tangential scanning with versatile adjustment options • Correction of tilt and lateral offset up to 0.5 µm • Aperture of 45 mm for the beam line • Air-bearing rotary stage for accuracies up to 0.0005° This positioning system allows tangential scanning in 6 degrees of freedom with a very high repeatability. The sample holder, which is adjustable in focus, angle and distance, is located on an XYZ phi delta aligner with aperture, which corrects for tilt and lateral offset in 4 axes. Specifications: - Standard System: DT250 (Rz) / MP200-5 (X, Y, Rx, Ry) / PMT160-DC-L (F) / PLT165-SM (Z) - Travel: n x 360 mm (Rz) / ±1.5 - ±2 mm (X, Y, Rx, Ry) / 90 mm (R) / 50 mm (F) / 100 mm (Z) - Repeatability: 0.0005 - 0.001 µm (Rz) / ±0.5 - ±5.2 µm (X, Y, Rx, Ry) / 1 µm (R) / ±0.3 - ±0.4 µm (F) / ±3.9 - ±4.4 µm (Z) - Positoning speed: 700-1400 mm/s (Rz) / 0.4 – 0.8 (XYZ) / 30-80 mm/s (FZ) - Max. load: 20 N (Ry) / 40 N (F) / 150 N (Z) - Motor: Iron Core Dynamic Linear Motor (Rz) / Stepper Motor (X, Y, Rx, Ry, Z) / manually (R) - Guide: Air Bearing (Rz) / Solid State, Gear Box, Lead Screw (X, Y, Rx, Ry) / Sliding Guide (R) / Cross Roller Bearings, Ball Screw (F) / Profile Rail, Ball Screw (Z) - Feedback: Angular Scale (Rz) / Open Loop (XY, Rx, Ry, Z) / Skale (R) / Linear Scale (F) - Aperture: Ø 45 mm Customized options: - Combinable standard stages for XYZ-Rx-Ry-Rz motions - Individual configuration with frame, vibration isolation, enclosure - Process adaptation for sensor/measuring head, sample holder - Version for clean room, laboratory and production - Wireless power and signal transmission - Integration into workflows via PLC or PC controller