XYZ positioning system 782300:179.26

portalfor the semiconductor industryfor clean rooms

XXL XYZ Portal with Vacuum Chuck Customizable: • Ideal for automated surface inspection with focus variation • Designed for sample weights up to 50 kg (excluding vacuum stage) • Passive vibration damping and decoupling of building vibrations (standard measuring chamber quality class 3 according to VDI 2627) • Enormously long lifetime with 1,000,000 full cycles and a maintenance interval of 500,000 full cycles resp. every 2 years This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system PMT160-SM is fixed to the traverse axis for the customerspecific sensor, which is used for the focus variation. The axes are fully enclosed, which prevents contamination and interference. Specifications: - Standard System: PLT320-SM (XY) / PMT160-SM (Z) - Travel: 1000 mm (XY) / 100 mm (Z) - Repeatability: ± 3.9 - ± 4.4 µm (XY) / ± 1.9 - ± 2.4 µm (Z) - Positoning speed: 30 mm/s (XY) / 10 mm/s (Z) - Max. load: 490 N (XY) / 40 N (F) / ± 45 N (Z) - Motor: Stepper Motor (XYZ) - Guide: Ball Screw (XYZ) - Führung: Profile Rail (XY) / Cross roller bearings (Z) - Feedback: Open Loop (XYZ) - Länge x Breite x Höhe: 2250 x 1500 x 1500 mm Customized options: - With linear scale for accuracies up to 0.3 µm - Modular system configuration - Safety cabinet - Special configuration for semiconductors, biotechnology, pharmaceuticals - Versions for clean room ISO 14644-1 (up to class 1 on request) - Ready-to-use motion control with pre-configured controller incl. sample software - Individual solution development with 3D Design for the positioning task