XYZ positioning system 782300:113.26

linearfor wafer inspection and metrologyfor laboratory applications

XYZ System for Laboratory and Wafer Inspection Customizable: • Ideal for setting up and expanding of your application • Highly precise repeatability up to 0.5 µm • Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s • Perfect flatness of ± 0.5 µm for positioning medium loads up to 150 N This XY combination with separate Z-vertical unit consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. Specifications: - Standard component: PMT160-DC (XYZ) - Travel: 300 mm (X) / 150 mm (Y) / 50 mm (Z) - Repeatability: ± 0.5 - ± 1.5 µm (XYZ) - Positoning speed: 25 mm/s (XYZ) - Max. load: 45 N (X) / 150 N (YZ) - Motor: DC-Motor, Ball Screw - Feedback: Linear Scale Customized options: - Different travels per axis from 50 - 300 mm - Rotational movements in combination with DT130 or DT200 - Various motor variants: DC motor, stepper motor, linear motor and nanomotion - Immediate use with pre-configured controller incl. exemplary software - Versions for clean room ISO 14644-1