XYZ positioning system 782300:222.26

portalfor wafer inspection and metrologywith stepper motor

Customizable: • Ideal for surface inspection and coating thickness measurement of large samples up to 650 x 650 mm • Precise measurement with repeatability up to 2 µm • Good price-performance ratio due to drive with stepper motor • Strong and robust Z-axis for sensors up to 20 kg • Suitable for industrial environments e.g. dust, smoke This inspection system is specially designed for automated quality control of large and flat specimens up to 50 kg. The positioning system allows simultaneous positioning of sensor in Z and specimen in XY on a very compact footprint. Specifications: - Standardkomponente: PLT240-SM (X) / PLT165-SM (Y) / PLT165-Manuell (Z) - Travel: 650 mm (XY) / 100 mm (Z) - Repeatability: ± 3.9 – ± 4.4 µm (XYZ) - Speed: 5 mm/s (XYZ) - Max. load: 300 N (X), 1000 N (Y) / 160 N (Z) - Drive: Stepper Motor (XY) | manuel (Z) - Feedback: - Open Loop (XY) Customized options: - Various travels up to 1000 mm - With/without frame and base plate made of granite or aluminum - Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system - Individual solutions for cable routing - Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers - Immediate use with pre-configured controller incl. exemplary software