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- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range).
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The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm. Parasitic rotations (along X and Y axis) are very limited. The moving frame can be custom designed (attachment points, holes...).
Performance: Max No-load displacement(µm):115; Heigth (mm): 12; Dimensions (mm):30*30; Resolution(nm): 1.2; Unloaded resonance frequency(Hz): 1200; Response time: 0.42
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The piezoelectric stage XY25XS is based on the APA25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, lens and CCD micro scanning.
Max displacement (µm): 20;
Dimensions (mm): 18*50*50;
Unloaded resonance frequency (Hz): 2200
Mechanisms
Mainly based on the APA concept, the CEDRAT Group has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantages of the APA concept offering a reliable, robust, precise and compact solution to the users.
These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force
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The piezoelectric stage XYZ200M is based on APA200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
Max no load XY displacement (µm): 180
Max Z displacement (µm) 200
Height(mm): 44
Dimensions (mm): 100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 380
Response time (ms): 1,32
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DSM's FlexFrame PiezoActuator™ products are flexure-guided piezoelectric actuators that use lever mechanisms to mechanically amplify the motion of piezo ceramics.
The flexures in each mechanism are designed to provide stable motion guidance and to minimize the resistance that the frame might impart to the piezoelectric actuation. DSM designs the flexures to stay within the material's fatigue limit under standard operating conditions.
DSM's FPA-2000E FlexFrame PiezoActuator(TM) was developed to satisfy requirements in wafer positioning for the semiconductor fabrication industry. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification frame.
See the complete family of standard FPA designs at the associated Web link. Custom inquries are welcome, and we simply ask "What 'mission critical motion control' requirement can we help you with?"
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DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.
DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.
In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using DSM's SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.
DSM welcomes custom requests for flexure-guided piezo actuator designs.
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The FB Series product line is a family of standard, modular linear stages available for single and multi-axis applications. The stage configuration utilizes crossed roller bearings, a linear optical encoder, and Nanomotion's ceramic servo motors.
The stages are offered in a wide range of widths and travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. Encoder resolutions can be varied to achieve a range of performance criteria and there are different size motors for each cross-section to meet necessary force/acceleration requirements.
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- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error.
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.
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- Compact Piezo Stage Design, only 44 x 44 x 44 mm
- 100 x 100 x 100 µm Travel Range
- 1 nm Resolution
- Ideal for Fiber-Alignment and Photonics Packaging Applications
- Optional E-760 Controller Card Features Built-In Optical Metrology
- Closed- and Open-Loop Versions
- Flexure-Guided Precision Trajectory Control
- Fast Scanning and Settling
- Large Variety of Controllers
The P-611 NanoCube® is a versatile, multi-axis piezo stage nanopositioning system. Its 100 x 100 x 100 µm positioning and scanning range comes in an extremely compact package of only 44 x 44 x 44 mm. Equipped with a zero-stiction, zero-friction guiding system, this NanoCube® provides motion with ultra-high resolution and settling times of only a few milliseconds. Open- and closed-loop versions are offered to fit your application.
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TRITOR series
highly compact design resulting in superior performance
accurate parallel motion through parallelogram design
high reliability due to solid state hinges
motion without mechanical play
high resolution in nm and sub-nm range
motion up to 400 µm
precision pin holes
applications:
optics, laser tuning, fiber positioning
micromanipulation, biology
scanning systems
vacuum and low temperature
The unique TRITOR elements are extremely compact but offer motions of up to 400 µm in all three axes. Parallel motion is achieved without mechanical play due to the mechanical design. As an option, integrated position control systems for overcoming the effect of hysteresis are available.
TRITOR elements can be easily combined with other mechanical positioning systems. They are well suited for many various applications reaching from optical research to OEM systems.
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DSM's flexure-guided piezoelectric actuators and stages are linear actuators for precision motion control and positioning applications. Our piezo actuators can be custom designed for specific micropositioning, nanopositioning, and scanning application requirements including vacuum compatibility and non-magnetic environments.
The FlexFrame PiezoActuator™ product family uses solid-state flexures as pivot joints to provide smooth, stiction-free and backlash-free motion for critical positioning applications. FlexFrame products are lever mechanisms that mechanically amplify the output motion of piezoelectric elements. Piezo actuators require no lubrication, and because there are no internal components sliding on each other, there are no particulates generated from the actuator's motion.
The standard FPA series within the FlexFrame family offers linear travel ranges between 80µm and 2mm. The compact designs are well suited to many positioning applications and come standard in durable, non-corrosive stainless steel or titanium designs configured with mounting interfaces to match a customer’s requirements.
The actuator assemblies are mechanically preloaded to ensure bidirectional operation, thus providing increased resilience to mechanical loads when compared to non-preloaded actuators. The resulting mechanism provides high-stroke operation in an exceptionally small package.
We invite custom design inquiries. What "mission critical motion control" requirement can we help you with?
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Elliot GoldTM Series XYZ flexure stage fitted with piezo actuators providing 25 µm of piezo and 2mm of manual adjustment in each of the three axes. This system can be controlled either via a simple piezo controller or an Elliot Scientific Device Automated Alignment System (DALi2).
Ultra-stable patented* design XYZ flexure stage
Minimal arcuate displacement
XYZ Piezo adjusters
25 µm piezo adjustment travel
10 nm resolution
2mm coarse manual travel
Orthogonal alignment grooves
4.5kg load capacity
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