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| DSM's FPA-2000E FlexFrame PiezoActuator(TM) provides precision motion control and positioning capabilities. The FPA-2000E is a flexure-guided piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. The FPA-2000E is available as a standard product with low voltage (150V) piezo material. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification structure. |
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DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.
DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.
In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using a SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage? |
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- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range). |
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The piezoelectric stage XY200M is based on the APA200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes and optical tweezer.
Max No-load displacement (µm): 180
Dimensions (mm): 18*100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 550 |
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The piezoelectric stage XY25XS is based on the APA25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, lens and CCD micro scanning.
Max displacement (µm): 20;
Dimensions (mm): 18*50*50;
Unloaded resonance frequency (Hz): 2200
Mechanisms
Mainly based on the APA concept, the CEDRAT Group has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantages of the APA concept offering a reliable, robust, precise and compact solution to the users.
These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force |
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The piezoelectric stage XYZ200M is based on APA200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
Max no load XY displacement (µm): 180
Max Z displacement (µm) 200
Height(mm): 44
Dimensions (mm): 100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 380
Response time (ms): 1,32 |
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- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error. |
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash. |
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- Flexure-guided Piezo Stage provides highest precision
- Fast Response (1 kHz Resonant Frequency)
- Stainless Steel Construction
- Frictionless Precision Flexure Guiding System
- 80 µm Travel Range
- Direct Metrology with LVDT Sensor
- Resolution <5 nm
- PICMA® High-Performance Piezo Drives
P-780 flexure-guided piezo stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling times of only a few milliseconds. The P-780 is designed for applications with loads up to 100 g. Closed-loop and open-loop versions are offered to fit your application.
Direct-metrology LVDT sensorP-780.20 models feature direct-measuring, non-contact LVDT sensors (direct metrology). |
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- Compact Piezo Stage Design, only 44 x 44 x 44 mm
- 100 x 100 x 100 µm Travel Range
- 1 nm Resolution
- Ideal for Fiber-Alignment and Photonics Packaging Applications
- Optional E-760 Controller Card Features Built-In Optical Metrology
- Closed- and Open-Loop Versions
- Flexure-Guided Precision Trajectory Control
- Fast Scanning and Settling
- Large Variety of Controllers
The P-611 NanoCube® is a versatile, multi-axis piezo stage nanopositioning system. Its 100 x 100 x 100 µm positioning and scanning range comes in an extremely compact package of only 44 x 44 x 44 mm. Equipped with a zero-stiction, zero-friction guiding system, this NanoCube® provides motion with ultra-high resolution and settling times of only a few milliseconds. Open- and closed-loop versions are offered to fit your application. |
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Elliot GoldTM Series XYZ flexure stage fitted with piezo actuators providing 25 µm of piezo and 2mm of manual adjustment in each of the three axes. This system can be controlled either via a simple piezo controller or an Elliot Scientific Device Automated Alignment System (DALi2).
Ultra-stable patented* design XYZ flexure stage
Minimal arcuate displacement
XYZ Piezo adjusters
25 µm piezo adjustment travel
10 nm resolution
2mm coarse manual travel
Orthogonal alignment grooves
4.5kg load capacity
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