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Stroke : 50 µm - 240 µm
Repeatability: 5, 10 nm
... Metrology • Interferometry • Photonics / integrated optics • Lithography • Nanopositioning • Scanning microscopy • Sample alignment • Micromachining Subnanometer resolution with capacitive sensors Capacitive sensors measure ...
Physik Instrumente
Stroke : 100, 400, 800 µm
Repeatability: 50, 10 nm
... • Significantly faster response and longer lifetime than motorized drives • Fine positioning of objectives with sub-nm resolution • Direct position measuring with capacitive sensors: Highest linearity • Large clear aperture with Ø ...
Physik Instrumente
Stroke : 100, 200 µm
... • Step-and-settle to 5 ms • Low overall height of 20 mm for easy integration • Clear aperture 93 mm × 65 mm • E-709 digital piezo servo controller in the scope of delivery • USB, RS-232, analog interfaces Product Description Application fields Super-resolution ...
Physik Instrumente
... • Resolution up to 20 nrad, excellent position stability • Optical beam deflection to 4 mrad • Various different materials for adapting the CTE between the platform and mirror • Parallel kinematics for higher accuracy and dynamics • Sub-ms response ...
Physik Instrumente
Stroke : 22 mm
Speed: 0.2 m/s
Repeatability: 0.2 µm
... operation Precision-class linear positioning stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking ...
Physik Instrumente
Stroke : 26, 13 mm
Speed: 8 mm/s
Repeatability: 100, 200 nm
... the drives acting directly on the runner and achieve velocities of max. 8 mm/s. Direct-measuring principle The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution ...
Physik Instrumente
Stroke : 25 mm
Speed: 0.02 m/s
Repeatability: 0.15, 0.2, 1 µm
... • Integrated linear encoder for maximum accuracy with 0.1 µm resolution • Minimum incremental motion 0.2 µm • Recirculating ball screw provides high velocity and long lifetime Highly accurate position measuring with incremental linear encoder Noncontact ...
Physik Instrumente
Stroke : 304, 102, 610, 407, 204 mm
Speed: 300, 100 mm/s
Repeatability: 5 µm
... Compact design thanks to models with folded drivetrain Models with holding brake for vertical mounting Powerful linear stage for use in demanding industrial applications Precision ball screws, high-performance stepper or synchronous ...
Physik Instrumente
Stroke : 5, 25, 15 mm
Speed: 1.5, 1 mm/s
Repeatability: 0.25, 2 µm
... Closed-loop DC motors Noncontact reference and limit switches XY setups can be mounted directly Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear ...
Physik Instrumente
Stroke : 32 mm
... • Only 32 mm in width and 8 mm in height • Direct position measurement with incremental encoder with 0.75 µrad resolution • Up to 3 µrad minimum incremental motion • Rotation range >360° • Velocity 45 °/s Product Description Piezo inertia drives ...
Physik Instrumente