Open-loop positioning stages

Stroke : 1 mm - 185 mm
Speed: 1 mm/s - 8.4 mm/s
Repeatability: 0.4 µm - 5 µm

LA95 - Application: transport stage, scanning stage - Benefit: high life time despite dry lube - Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 2.2 mm/s
Repeatability: 1 µm - 5 µm

HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.7 µm - 5 µm

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 3.4 mm/s
Repeatability: 0.3 µm - 5 µm

HT240 Precise high load vertical lifting stage Application: Vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Load: 1 kg - 12 kg

DT310 Flat rotary stage with large aperture The high-precision rotary stage, with its flat design and excellent process accuracy, enables a wide range of applications. Due to its large aperture, ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 8.3 mm/s
Repeatability: 0.5 µm - 5 µm

... to 25 mm. Thanks to our modular axis systems, it can be effortlessly combined with matching DT series rotary stages or PLT series linear stages to create complex multi-axis systems. Suitable for industrial ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.5 µm - 5 µm

HT160 High precision lifting stage The lifting stage HT160 is suitable for high precision vertical move­ments. The combination of geared motors and a precise ball screw enables very small adjustment ...

Stroke : 1 mm - 80 mm
Speed: 1 mm/s - 60 mm/s
Repeatability: 0.7 µm - 5 µm

MT130 Compact linear stage with internal motor The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact ...

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1750 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 46 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... 1770 is the second largest positioning stage of the SLC-17 series. It offers a travel range of 46 mm and still compact dimensions of 70 x 17 x 8.5 mm. Please note that the downloadable documents for ...

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 30 Max. Lift Force [N] > 1.5 Dimensions [mm] 32 x 52 x 11 Weight [g] - 54 Open-loop Resolution ...

Stroke : 51 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 30 Max. Lift Force [N] > 1.5 Dimensions [mm] 32 x 82 x 11 Weight [g] - 87 Open-loop Resolution ...

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 200, 40 nm

... perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 20 Max. Lift Force [N] > 1.0 Dimensions [mm] 52 x 52 x 14 Weight [g] - 94 Open-loop Resolution ...

Stroke : 51 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 20 Max. Lift Force [N] > 1.0 Dimensions [mm] 52 x 82 x 14 Weight [g] - 157 Open-loop Resolution ...

Stroke : 103 mm
Speed: 20 mm/s
Repeatability: 200, 40 nm

The larger CLS-92 linear stage has a footprint of 92 x 152 mm and a travel range of 103 mm. Furthermore it is able to handle payloads of up to 20 N. Linear stages of the CLS series have been specifically ...

Stroke : 4.5 mm
Speed: 10 mm/s

... complex multi-axis systems. Stages of the SL series are 11 mm in width and 5.2 mm in hight. Mechanical Blocking Force [N]≥ 1.6 Max. Normal Force [N]1 Max. Lift Force [N]0.35 Dimensions [mm]11 x 11 x 5.2 Open-loop Resolution ...

Electromagnetic Rotation Stages for 24/7 operation. SMARSHIFT rotation stages of the MR-92 series are designed to be compatible to the linear SMARSHIFT stage MLS-92122 as well as the ...

... Max. Normal Force [N] - 5 Dimensions [mm] - 25 x 20 x 8.5 Weight [g] - 13 Aperture [mm] - 8 Open-loop Angular Velocity [°/s] - ~ 45 Open-Loop Resolution [µ ...