Linear stage CLS-92152
piezoaluminumvacuum-compatible

Linear stage - CLS-92152 - SmarAct GmbH - piezo / aluminum / vacuum-compatible
Linear stage - CLS-92152 - SmarAct GmbH - piezo / aluminum / vacuum-compatible
Linear stage - CLS-92152 - SmarAct GmbH - piezo / aluminum / vacuum-compatible - image - 2
Linear stage - CLS-92152 - SmarAct GmbH - piezo / aluminum / vacuum-compatible - image - 3
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Characteristics

Orientation
linear
Type
piezo
Other characteristics
aluminum, vacuum-compatible, closed-loop, industrial, open-loop
Stroke

103 mm
(4.055 in)

Speed

20 mm/s

Repeatability

40 nm, 200 nm

Description

The larger CLS-92 linear stage has a footprint of 152 x 92 mm and a travel range of 103 mm. Furthermore it is able to handle payloads of up to 20 N. Linear stages of the CLS series have been specifically designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive Units which guarantees an easy access to the stages core component, the piezo drive which makes servicing a simple task. The drive unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 20 Dimensions [mm] 92 x 152 x 17 Weight [g] - 591 Open-loop Open-Loop Resolution MCS2 [nm] - < 1 Open-Loop Resolution (H)CU [nm] - < 50 Closed-Loop Sensor Resolution MCS2 [nm] - 1 (S), 4 (L) Sensor Resolution (H)CU [nm] - 100 (L) Uni-Directional Repeatability MCS2 [nm] - ± 40 (S,L) Uni-Directional Repeatability (H)CU [nm] - ± 200 (L) Options Material Options - Aluminum base as standard; Titanium base (-TI) Performance Options - Higher blocking force (-D): +1.5 N Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar) Non-Magnetic Option - Yes

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