Linear nanopositioning stage PLF5252-x.200

piezo1-axiscompact

SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm. The PLF5252-x.200 offers a scan range of over 200 μm in the X direction. At 90 g, it is very light and also quite compact at 52 x 52 x 15 mm. Specifications Scan Range [µm] - > 200 Max. Normal Force [N] - 5.0 Dimensions [mm] - 52 x 52 x 15 Weight [g] - 90 Material Base Material - Titanium(-TI) / Aluminum base (-Al) - Open-loop Open-Loop Resolution MCS2 [nm] - MCS2: <1 - Closed-Loop Sensor Resolution MCS2 [nm] - MCS2: 1 (S) - Options Vacuum Options - HV (10⁻⁶mbar) Non-Magnetic Option - Yes (- NM)