SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.
The PLF3232-xy.60 offers a scan range of 60 μm in the X and Y direction. At 45 g, it is very light and also quite compact at 32 x 32 x 20 mm. It combines two PLF3232-x.60 Scanners in one, with less built hight but same performance.
Due to the size and hole pattern, it fits ideal to other linear stages and positioners such as the CLS-3232 whereby long travel range and high precision is combined.
Specifications
Scan Range [µm] - > 60
Max. Normal Force [N] - 5
Dimensions [mm] - 32 x 32 x 20
Weight [g] - 45
Material
Base Material - Titanium(-TI) / Aluminum base (-Al)
Open-loop
Open-Loop Resolution MCS2 [nm] - MCS2: <1
Closed-Loop
Sensor Resolution MCS2 [nm] - MCS2: 1 (S)
Options
Vacuum Options - HV (10⁻⁶mbar)
Non-Magnetic Option - Yes (- NM)