Linear stage CLS-9292

piezoaluminumvacuum-compatible

The smaller one of the CLS-92 linear stages offers a footprint of 92 x 92 mm and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N. Linear stages of the CLS series were consistently designed for high availability applications in science and industry. They are equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. The drive unit can be exchanged without removing the complete device from the surrounding positioning setup. Additionally, their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 20 Dimensions [mm] 92 x 92 x 17 Weight [g] - 357 Open-loop Open-Loop Resolution MCS2 [nm] - < 1 Open-Loop Resolution (H)CU [nm] - < 50 Closed-Loop Sensor Resolution MCS2 [nm] - 1 (S), 4 (L) Sensor Resolution (H)CU [nm] - 100 (L) Uni-Directional Repeatability MCS2 [nm] - ± 40 (S,L) Uni-Directional Repeatability (H)CU [nm] - ± 200 (L) Options Material Options - Aluminum base as standard; Titanium base (-TI) Performance Options - Higher blocking force (-D): +1.5 N Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar) Non-Magnetic Option - Yes