The CLL42 offers a large platform to mount the payload and features long travel ranges as well as exchangeable drive units.
The CLL42 is equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. It is also available in a high vacuum version. The standard versions offer travels of 99, 179, 259, 379, 499 and 619 mm.
Mechanical
Blocking Force [N] - ≥ 5
Max. Normal Force [N] - 30
Max. Lift Force [N] - 1.5
Dimensions [mm] - 60 x 16 (open-loop carriage)
Weight [g] - Length-dependen
Open-loop
Open-Loop Resolution MCS2 [nm] - < 1
Open-Loop Resolution (H)CU [nm] - 50
Closed-Loop
Sensor Resolution MCS2 [nm] - 1 (S), 4 (L)
Uni-Directional Repeatability MCS2 [nm] - ± 100 (S)
Options
Material Options - Multiple carriages; Counterbores; Tapped holes (M4)
Mechanical Options - Multiple carriages; Counterbores; Tapped holes (M4)
Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar)