SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.
The PLF3232-z.60 offers a scan range of over 60 μm in the Z direction. At 30 g, it is very light and also quite compact at 32 x 32 x 15 mm.
Specifications
Scan Range [µm] - > 60
Max. Normal Force [N] - 5.0
Dimensions [mm] - 32 x 32 x 15
Weight [g] - 30
Material
Base Material - Titanium(-TI) / Aluminum base (-Al)
Open-loop
Open-Loop Resolution MCS2 [nm] - MCS2: <1
- Closed-Loop
Sensor Resolution MCS2 [nm] - MCS2: 1 (S)
- Options
Vacuum Options - HV (10⁻⁶mbar)
Non-Magnetic Option - Yes (- NM)