Gas filter Wafergard® Max 1000
particulatemembranelow-pressure

gas filter
gas filter
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Characteristics

Designed for
gas, particulate
Filtration element
membrane
Applications
low-pressure
Material
PTFE
Other characteristics
hydrophobic, in-line
Operating pressure

Max.: 9.8 bar
(142.137 psi)

Min.: 2.5 bar
(36.259 psi)

Filtration size

Max.: 0.03 µm

Min.: 0.01 µm

Description

Wafergard® Max 1000 In-line Teflon® Gas Filter Superior particulate filtration for ultrapure gas applications - PTFE membrane Large filtration area - 3X larger filtration, low pressure drop and high flow Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO) Materials: Hydrophobic PTFE membrane supported by molded Teflon® PFA structures Housing: 316L stainless steel O-ring: Encapsulated fluoroelastomer (E-FKM) Surface finish interior: ≥25 µin Ra Removal rating: ≥99.9999999% removal of ≥0.003 µm particles in gas Downstream cleanliness: < 0.03 particles/liter ( 0.01 µm Maximum operating conditions: Maximum inlet pressure: 9.8 bar (142 PSIG) Maximum forward differential pressure: 3.9 bar (57 PSID) Maximum reverse differential pressure: 2.5 bar (36 PSID) Maximum operating temperature: 120°C (248°F) Helium leak rating: 1 x 10 (-10) Pa.m³/sec Warranty: 1 year

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