Combined modules positioning system ZT

XYverticalfor wafer inspection and metrology

The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc. Characteristics - Infinite rotation - Built-in vacuum supply at wafer chuck level - Built-in gravity compensator - ISO1 clean room compatible thanks to vacuum suction - Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment - Version without a coarse Z can be done - Very good Z jitter as well as move and settle Main features - Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T - Position accuracy: ±0.6 µm for Z and ±3 arcsec for T - Speed up to: 0.1 m/s for Z and 15.7 rad/s for T - Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T - Position stability: ±5 nm for Z and ±0.2 arcsec for T - Load capacity: 1 kg