Low profile high precision XY stage
IntelLiDrives, Inc.
Precision motorized XY-Rotary LSMA-RTHM combination positioning stages offer superior positioning performance in a very compact, low profile unit. They are ideal for space-critical optical, semiconductor, laser and vacuum applications.
Constructed from a special lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball bearings for low friction and superior motion smoothness. These precision actuators with micrometer-grade 0.5 mm pitch screws provides exceptional accuracy, repeatability, and ultra-fine positioning resolution.
Stages can be driven by brushless servo or micro-stepped motor.
Specifications:
- XY axes range 50 ... 200 mm
- rotary axis 360 deg
- resolution linear axes 0.25 micron
- resolution rotary axis 3 arc-sec
- max speed linear axes 25 mm/sec
- max speed rotary axis 10 rpm
- max load 10 Kg
- motors: micro-stepper, DC servo, "Smart motor"
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