Auger electron spectrometer (AES)
JAMP-9500F Jeol

The JAMP-9500F offers the highest spatial resolution available in a microprobe: (min. probe diameter of 3nm for SEI ; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented "in-lens" Schottky field emission gun, the JAMP-9500F obtains very small spot sizes with beam currents up to 200nA.

The electron spectrometer is an electrostatic hemispherical analyzer (HSA) with a multi-channel detector, and was optimally designed for Auger analysis. It provides extreme energy resolution without sacrificing sensitivity.

With the JAMP-9500F, high resolution SEM imaging is possible as well as Auger image analysis and line profile analysis. Also, depth profile analysis can be performed during ion etching.

The JAMP-9500F features a high performance ion gun for high speed sputtering and low energy charge neutralization. User-friendly and easily operated, the JAMP-9500F also offers the flexibility of optional analysis functions such as EDS, SIMS and XPS.

Features

- 3nm SEI resolution
- 8nm probe diameter for Auger analysis
- Variable energy resolution from 0.05% to 0.6%
- Chemical state analysis in several 10nm areas
- Neutralizing gun allows Auger analysis of insulating materials
- Large specimen stage - samples up to 95mm in diameter