Temperature measurement system SensArray®

toolautomatic

In Situ Temperature Measurement Automation Package The SensArray® Automation package provides fast automated collection of process tool chamber temperature measurements. The package includes an overhead track (OHT) compatible FOUP, automation station, system automation controller and office PC software seat components. SensArray FOUPs can be processed the same way as any production FOUP, with direct data porting to SPC charts. SensArray Automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage in the fab’s MES database. Applications Process development, Process qualification, Process tool monitoring, Process tool qualification, Chamber matching, Process tool matching