very compact design
especially for optical devices and samples
Miniature xyz positioners with piezo electrical inertial drive.
Technical data
Width - 35 mm
Height - 18.5 mm
Depth - 25 mm
Max. Load (3 axis)
Mx, My, Mz (momentum) - 1.5 Ncm
Blocking forces (Fx, Fy, Fz) - 2 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 2 um
Lateral deviation - 2 um