XYZ stage MS15translationpiezoelectric3-axis
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Characteristics
- Orientation
- translation, XYZ
- Type
- piezoelectric
- Number of axes
- 3-axis
- Other characteristics
- compact, miniature
- Stroke
3 mm
(0.118 in)- Speed
1.5 mm/s
- Load
6 g
(0.21 oz)
Description
Compact design
smallest product in our portfolio
Ultra small miniature translation stages with piezo electic inertial drive.
Technical data
Width - 15 mm
Height - 7 mm
Depth - 15 mm
Max. Load (3 axis)
Mx, My, Mz (momentum) - 4 Ncm
Blocking forces (Fx, Fy, Fz) - 3 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 1 um
Lateral deviation - 2 um
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