Linear positioning stage MX25XYZpiezoelectric3-axis
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Characteristics
- Orientation
- linear, XYZ
- Type
- piezoelectric
- Number of axes
- 3-axis
- Other characteristics
- miniature, vacuum-compatible, roller
- Stroke
2 mm
(0.079 in)- Speed
1.2 mm/s
- Load
46 g
(1.62 oz)
Description
for high vacuum conditions up to 10^(-6) mbar
25 x 35 mm footprint
Miniature xyz positioners with piezo electrical inertial drive. Vacuum edition of the MX 25.
Technical data
Width - 35 mm
Height - 18.5 mm
Depth - 25 mm
Max. Load (3 axis)
Mx, My, Mz (momentum) - 1.5 Ncm
Blocking forces (Fx, Fy, Fz) - 2 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 2 um
Lateral deviation - 2 um
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