Linear positioning stage MS15XYZpiezoelectric3-axis
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Characteristics
- Orientation
- linear, XYZ
- Type
- piezoelectric
- Number of axes
- 3-axis
- Other characteristics
- miniature, vacuum-compatible
- Stroke
3 mm
(0.118 in)- Speed
1.5 mm/s
Description
for ultra-high vacuum conditions up to 10^(-9) mbar
3.5 mm travel in x, y and z direction
15 x 15 mm footprint
Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.
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Triaxial
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