Low flow thermal mass flow-meter
M330B
MKS Instruments
photo - M330 B Low Pressure Drop, Analog, Metal-sealed Mass Flow Controller
The MKS Instruments M330B Low Pressure Drop Thermal Mass Flow Controller is a metal sealed mass flow controller designed specifically for applications where low pressure drop across the controller is critical. One application is controlled delivery of Safe Delivery Source® (SDS®) gases in ion implant applications to maximize the utilization of the SDS gas. The M330 B Low Pressure Drop Thermal Mass Flow Controller comes in the standard three inch MFC footprint with an electropolished 5 microinch Ra surface finish and metal seals assuring product cleanliness. Accuracy of the device is 1% of Full Scale over the dynamic control range. To establish the configuration to suit your specific application, consult Customer Service.
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