Thermal mass flow controller 1640A
for gas

thermal mass flow controller
thermal mass flow controller
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Characteristics

Technology
thermal mass
Fluid
for gas
Flow rate

Max.: 1 l/h
(0.26417 us gal/h)

Min.: 0 l/h
(0 us gal/h)

Pressure

5 psi

Description

The MKS Instruments 1640 Pressure-based Mass Flow Controller is a metal-sealed instrument with standard 3-inch footprint, designed to meter and control gas flows in low-line pressure applications where thermal mass flow controllers are limited in their ability to accurately measure flow. The 1640 utilizes the principle of sonic flow through an orifice, a condition met when the upstream control pressure is at least twice the downstream pressure. Under these conditions, mass flow is proportional to the control pressure. In the 1640A Pressure-Based Mass-Flo Controller, a Baratron® capacitance manometer monitors the pressure upstream of the critical orifice. This pressure is proportional to flow. The measured pressure is compared in the control electronics to the flow set point. A control signal is then generated to drive the proportional control valve to the conductance as required to bring the actual control pressure (flow) into agreement with the flow set point.

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Exhibitions

Meet this supplier at the following exhibition(s):

ACHEMA 2024
ACHEMA 2024

10-14 Jun 2024 Frankfurt am Main (Germany)

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    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.