Thermal mass flow controller GE50A
for gas

thermal mass flow controller
thermal mass flow controller
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thermal mass
for gas
Flow rate

Min.: 0 l/h (0 us gal/h)

Max.: 3,000 l/h (13 us gal/h)


150 psi


The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding. A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements.


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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.