... PhableR 100 system is based on the proprietary PHABLE (short for Photonics Enabler) photolithographic technology developed by Eulitha AG, which makes it possible to print high-resolution periodic structures in a non-contact, ...
... the system offers additional capabilities for multi-purpose configurations, including bond alignment and nanoimprint lithography. Furthermore, the EVG’s proprietary SmartNIL technology is supported on both semi-automated ...
... manufacturing or EVG’s SmartNIL process. Key features of the EVG770 include precise alignment capabilities, full process control and the flexibility to address requirements of a wide variety of devices and applications. Features Efficient ...
The IQ Aligner UV-NIL System allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300 mm diameters and is well suited for highly parallel fabrication of polymeric microlenses. Starting ...
... structures with the tiniest sub-micrometer features possible. These systems use the high precision galvo technology that has a galvanic mirror system to deflect the laser focus position laterally, ...
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