EV Group: Production Machines - DirectIndustry

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EV Group

All EV Group products

Mask Alignment Systems

semi-automatic mask aligner

semi-automatic mask aligner EVG®610

automatic mask aligner

automatic mask aligner EVG®620NT

Resist Processing Systems

wafer processing line

wafer processing line EVG®101

baking unit EVG®105

processing line for the food industry

processing line for the food industry EVG®120

processing line for the food industry

processing line for the food industry EVG®150

Nanoimprint Lithography

UV-NIL photolithography system

UV-NIL photolithography system UV/EVG®620 NT

UV-NIL photolithography system

UV-NIL photolithography system UV/EVG®770

UV-NIL photolithography system

UV-NIL photolithography system IQ Aligner®

Permanent Bonding Systems

eutectic wafer bonder

eutectic wafer bonder EVG®501

automated wafer bonder

automated wafer bonder EVG®520 IS

automated wafer bonder

automated wafer bonder EVG®540

Bond Alignment Systems

wafer alignment system

wafer alignment system EVG®610 BA

for bonding R&D MEMS

Fusion and Hybrid Bonding Systems

manual cleaning system

manual cleaning system EVG®301

for the chemical industry

plasma surface treatment machine

plasma surface treatment machine EVG®810LT LowTemp™

automated wafer bonder

automated wafer bonder GEMINI®FB

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