- Hydraulics - Pneumatics >
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- Plasma vacuum pump
Plasma vacuum pumps
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Ultimate vacuum: 0.01 mbar
Flow rate: 110 m³/h
... energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. Fast chamber pump down and extremely low power usage The iXL600(N) and iXL1000(N) ...
Ultimate vacuum: 0.03 mbar
Flow rate: 85 m³/h
... components Compact Design COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen ...
Busch Vacuum Solutions
Ultimate vacuum: 0.03 mbar
Flow rate: 160 m³/h
... components Compact Design COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen ...
Busch Vacuum Solutions
Ultimate vacuum: 0.01 mbar
Flow rate: 600 m³/h
... pumping speeds Compact Design COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen ...
Busch Vacuum Solutions
Ultimate vacuum: 0 mbar
Flow rate: 930 m³/h
... The COBRA BC 1000 F and BC 2000 F feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The fore-pump and vacuum booster are combined ...
Busch Vacuum Solutions
Ultimate vacuum: 0 mbar
Flow rate: 1,580 m³/h
... The COBRA BC 1000 F and BC 2000 F feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The fore-pump and vacuum booster are combined ...
Busch Vacuum Solutions
Ultimate vacuum: 0.6 Pa
Flow rate: 4 l/min
Power: 2.4 kW
DRY VACUUM PUMP MS SERIES MS series is a vacuum pump which is categorized as screw type dry vacuum pump. Corrosion resistance and ...
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