The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well-suited for dynamic processes, including laser-based processing or rapid anneals. The remarkably compact MXE is easily integrated. Its flexible control options support a variety of I/O protocols.
Features
In-situ, non-contact temperature and emissivity measurement
High-speed measurement ideal for a variety of applications
Variety of temperature and reflectance wavelengths
EtherCAT®, USB, and RS-232 output option
Benefits
Improves temperature-measurement accuracy for critical processes
Enhances repeatability and minimizes variation
Increases productivity, yield, and throughput
Increases stability and reliability across multiple chambers and substrate materials