Metallization sputtering machine FLC

for automotive applications

Overview
The LEYBOLD OPTICS FLC series are roll-to-roll high-vacuum sputter coating systems designed for R&D and production. Configurable with up to six rotatable cathodes and modular processing sections, the series supports single-pass deposition of metal and dielectric layer stacks and is available in coating widths of 650 mm, 1600 mm and 2000 mm.

Key benefits

• Single-pass multi-layer deposition via optional gas separation between processing sections, enabling mixed metal/dielectric stacks in one run.
• Flexible configuration: up to six rotatable cathodes, multiple power-supply options, in-situ metrology, plasma pre-treatment and configurable winding systems for a wide range of substrates and processes.
• Fast changeover between applications by swapping targets and recipes with minimal hardware modification, suitable for R&D and production trials.

Highlight features

• Versatility: Support for DC, DC unipolar pulsed, DC bipolar pulsed and MF power supplies for reactive and non-reactive sputtering.
• Particle control & process stability: sputter-up cathode orientation, turbomolecular pumps, cold traps and a temperature-controlled coating drum (standard -15 to +80 °C).
• Maintenance access: machine layout provides easy access to key components for cleaning and service.

Suitable substrates and materials

• Substrates: PET, PEN, PI, aluminium, stainless steel, copper, flexible glass; substrate roll diameter up to 500 mm.
• Deposition materials: metals (Ag, Al, Cu, Cr, NiCr, Ti) and dielectrics/oxides (AZO, ITO, SiO2, SiN, SnO2, Nb2O5, TiO2).

Applications

• Transparent conductive ITO coatings for displays and touchscreens.
• Flexible printed circuits (FPCB) and roller-type capacitor film metallization.
• Low-emissivity (low-e) and smart glass, electrochromic foils for architectural and automotive glazing.
• Functional coatings to improve lithium‑ion battery performance and other advanced electronic materials.

Other features / Technical specifications

• Model family: LEYBOLD OPTICS FLC series
• Machine sizes / coating widths: 650 mm, 1600 mm, 2000 mm
• Typical coating width (example FLC 650): up to 650 mm
• Maximum substrate roll diameter: up to 500 mm
• Coating drum temperature range: standard -15 °C to +80 °C
• Cathodes: up to six rotatable cathodes; sputter-up orientation
• Power supplies supported: DC, DC unipolar pulsed, DC bipolar pulsed, MF
• Vacuum equipment: turbomolecular pumps and cold traps
• Process options: gas separation between sections, plasma pre-treatment, in-situ layer measurement systems, closed-loop process control, configurable winding system