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Precision plate heater
aluminum

precision plate heater
precision plate heater
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Characteristics

Function
precision
Material
aluminum

Description

Utilizing state of the art heater technology, Durex manufactures precision cast-in bake platens specifically for semiconductor processing 200mm, 300mm, and 450mm wafers. The cast-in platen heaters are cast of pure aluminum (99.7%) to ensure maximum operating temperatures of 450°C (842°F) with minimum risk of process contamination. The casting process is controlled to eliminate any defects in the machined surface or casting body that would be caused by porosity. A mineral insulated heating element is distributed throughout the casting to provide surface temperature uniformity of ± 1% or better of the process operating temperature. An available hard-anodized finish provides an abrasion-resistant dielectric barrier on the working surface of the cast-in bake platen heater.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.