Temperature measurement system Summit
for waferscalibrationhigh-precision

temperature measurement system
temperature measurement system
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Characteristics

Measured physical value
temperature
Measured material
for wafers
Applications
calibration
Other characteristics
high-precision, microscope

Description

High-precision probe system that enables unattended testing at multiple temperatures. Excellent measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment, at a temperature range from -60°C to 300°C. Summit™ series manual and semi-automated probe systems, with PureLine™ and AttoGuard® technology, allow you to access the full range of your test instruments for 200 mm and 150 mm wafers. Whatever your application: RF/Microwave, device characterization, wafer level reliability, e-test, modeling, or yield enhancement, Summit series platforms lead the industry in on-wafer measurements. Summit series probe stations are easy to configure with your choice of measurement performance, manual or semi-automated operation, chuck size, thermal range and microscope options. All platforms are -60°C to 300°C compatible to ensure an upgrade path to meet your future needs. The powerful Velox™ probe station control software features easy on-screen navigation, wafer mapping, automation and seamless integration with analyzers and measurement software. It enables simple operation of motorized positioners and thermal systems. For a wide range of applications, the Summit probe station powered by Velox software achieves high test efficiency

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