Optical measurement system CM300xi-SiPh
for waferscalibrationfully-automatic

optical measurement system
optical measurement system
optical measurement system
optical measurement system
optical measurement system
optical measurement system
optical measurement system
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Characteristics

Technology
optical
Measured material
for wafers
Applications
calibration
Other characteristics
fully-automatic, microscope

Description

300 mm Probe Station with Integrated Silicon Photonics Wafer and Die-Level Probing Solution The CM300xi-SiPh 300 mm probe station is the first verified integrated measurement solution on the market that enables engineering and production-proven, optimized optical measurements right after installation – without further development. This unique Autonomous SiPh Measurement Assistant provides a groundbreaking set of functions that precisely calibrate the optical positioning hardware to the probe station and verify the performance of the integrated system. In combination with the revolutionary OptoVue for advanced calibrations, intelligent machine vision algorithms and the exclusive SiPh TopHat for dark, shielded and frost-free environment, the system enables true hands-free autonomous calibration and re-calibration at multiple temperatures. This enables faster time to more accurate measurements and reduced cost of test. FormFactor’s exclusively developed SiPh-Tools and Photonics Controller Interface (PCI) provide powerful software tools for alignments, data collection and analysis. This includes all necessary algorithms for using fibers and fiber arrays with both surface and edge coupling applications.

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