Wafer measurement system PM8

microscope

The PM8 is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW and sub-THz probing, opto-engineering and MEMS. Probe platen • Compatible with probe card adapters • Probe cards and positioners can be used simultaneously • Large space to fit several positioners on each side • mm-Wave platen for 110 GHz load pull and other RF noise applications • Cooled platen for chucks up to 300 °C Platen movement • 45 mm travel range for maximum flexibility • System height can adapt easily from wafer to package board application • Motorized movement option for quick operation