Wafer measurement system SiPh

microscope

FormFactor’s Autonomous Silicon Photonics Measurement Assistant sets the industry-standard in wafer and die-level silicon photonics probing. This highly flexible solution provides a multitude of testing technologies from single fibers to arrays and from vertical coupling to edge coupling. With the new revolutionary OptoVue for advanced calibrations, intelligent machine vision algorithms and the exclusive SiPh TopHat for dark, shielded and frost-free environment, the system enables hands-free autonomous calibration and re-calibration at multiple temperatures. This enables faster time to more accurate measurements and reduced cost of test. The use of single optical fibers and fiber arrays as probes to couple light into and out of a wafer for both surface and edge coupling creates many challenges that FormFactor manages through its Contact Intelligence technology. Unlike electrical testing, optical testing uses fibers and fiber arrays that do not contact their corresponding ‘pads’ known as grating couplers or facets on the wafer surface and edge, respectively. Instead, fibers need to be articulated relative to the couplers and facets to find the position of maximum optical power transfer. Setting the initial position of the fiber or array tips relative to the gratings and facets and then optimizing their position is accomplished through unique automated techniques developed by FormFactor engineers. Using advanced image processing and specially developed algorithms, Z height setting, fiber-to-facet gap, as well as a suite of automated calibrations of the positioning solution to the probe station are available.