Magnetron sputtering machine OPT-S 800

vertical in-linefor automotive applications

Overview
OPT-S 800 is a magnetron sputtering optical coating system with an effective coating area of Φ650 × H450 mm and a chamber of Φ1150 × H980 mm. The system integrates ion-source etching and four sputtering sources, available in planar or cylindrical configurations. The OPT-S series is built for high-uniformity multilayer coatings used in optical lenses, automotive panels, display screens, LiDAR modules and head-up displays (HUD).

Applications

• Optical lenses
• Automotive exterior and interior panels
• Display and touchscreen panels
• LiDAR and sensing optics
• Head-up displays (HUD)

Listed Film Types

• Cut-off filters
• Band-pass filters and RGB filters
• AR (anti-reflective) coatings
• Hard AR
• IR-AR
• HR (high-reflective) coatings
• AS/AF (anti-smudge / anti-fingerprint) coatings
• ITO (transparent conductive) coatings

Key Benefits

• Four sputtering sources with planar or cylindrical options for flexible process setup
• Online optical monitoring for real-time spectral feedback and deposition endpoint control of multilayer stacks
• Planetary (revolution and rotation) substrate motion to ensure uniform film-thickness distribution during multilayer deposition
• Sputtering process produces dense, well-adhered optical films with low absorption and scattering losses

Features

• Effective coating area: Φ650 × H450 mm
• Chamber size: Φ1150 × H980 mm
• Workpiece carrier: Φ135 × 10 shafts (adjustable); vertical planetary cylindrical carrier
• Touch-screen interface and PLC control
• Two molecular pumps (system vacuum components)

Product Parameters (table)
Model: OPT-S 800
Coating Technology: Magnetron sputtering
Etching Technology: Ion-source etching
Substrate Materials: Glass, crystalline materials, polymers, ceramics, metals
Equipment Structure: Integrated vertical system; side-opening door; 2 viewing windows
Chamber Size (Diameter × Height): Φ1150 × H980 mm
Effective Coating Area (Diameter × Height): Φ650 × H450 mm
Workpiece Carrier Specification: Φ135 × 10 shafts; adjustable
Sputtering Sources: 4; planar / cylindrical options
Working Temperature: Room temperature to 300°C (adjustable)
Ultimate Vacuum: 8 × 10⁻⁵ Pa (no-load, clean-room condition)
Process Gases: Argon, nitrogen, oxygen, acetylene
Equipment Dimensions (L × W × H): L3.8 × W1.8 × H2.3 m

Technical specifications

• Model: OPT-S 800
• Coating method: Magnetron sputtering
• Etching method: Ion-source etching
• Chamber: Φ1150 × H980 mm
• Effective coating area: Φ650 × H450 mm
• Workpiece carrier: Φ135 × 10 shafts, vertical planetary
• Sputtering sources: 4 (planar or cylindrical options)
• Temperature range: RT to 300°C
• Ultimate vacuum: 8 × 10⁻⁵ Pa (no-load, clean-room condition)
• Process gases: Ar, N2, O2, C2H2
• Dimensions: L3.8 × W1.8 × H2.3 m